Products :: Design-Kits :: MEMS Devices

Design kits for MEMS devices

Foundry Process CAD tool Version Notes
MEMSCAP
PiezoMUMPS Cadence 5.1.41 1.0 1
Cadence 6.1.5 1.0 1
Tanner 1.0 1
SOIMUMPS Cadence 1
Tanner 1
Mentor Graphics 1
MetalMUMPS Cadence 1
Tanner 1
Mentor Graphics 1
PolyMUMPS Cadence 1
Tanner 1
Mentor Graphics 1
Bulk Micromachining ams
+ Post process
Cadence 1
Tanner 1

CAD Tools

CMP provides a CAD Tool for MEMS design : SoftMEMS

Notes:

  1. Design rules, technology files, DRC

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