Products :: Design-Kits :: MEMS Devices
Design kits for MEMS devices
| Foundry | Process | CAD tool | Version | Notes |
|---|---|---|---|---|
| MEMSCAP | ||||
| PiezoMUMPS | Cadence 5.1.41 | 1.0 | 1 | |
| Cadence 6.1.5 | 1.0 | 1 | ||
| Tanner | 1.0 | 1 | ||
| SOIMUMPS | Cadence | 1 | ||
| Tanner | 1 | |||
| Mentor Graphics | 1 | |||
| MetalMUMPS | Cadence | 1 | ||
| Tanner | 1 | |||
| Mentor Graphics | 1 | PolyMUMPS | Cadence | 1 |
| Tanner | 1 | |||
| Mentor Graphics | 1 | |||
| Bulk Micromachining | ams + Post process |
Cadence | 1 | |
| Tanner | 1 |
CAD Tools
CMP provides a CAD Tool for MEMS design : SoftMEMS
Notes:
- Design rules, technology files, DRC
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