Foundry | Process | CAD tool | Version | Notes |
---|---|---|---|---|
MEMSCAP | ||||
PiezoMUMPS | Cadence 5.1.41 | 1.0 | 1 | |
Cadence 6.1.5 | 1.0 | 1 | ||
Tanner | 1.0 | 1 | ||
SOIMUMPS | Cadence | 1 | ||
Tanner | 1 | |||
Mentor Graphics | 1 | |||
MetalMUMPS | Cadence | 1 | ||
Tanner | 1 | |||
Mentor Graphics | 1 | PolyMUMPS | Cadence | 1 |
Tanner | 1 | |||
Mentor Graphics | 1 | |||
Bulk Micromachining | ams + Post process |
Cadence | 1 | |
Tanner | 1 |
CMP provides a CAD Tool for MEMS design : SoftMEMS
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