Micromachining and Microfabrication Conference


Aim of the Conference

This Conference will bring together researchers, engineers and practitioners involved in the development of process technologies for MEMS and MOEMS. The participants will also have the opportunity to interact with the other Conference by the means of plenary invited talks.

Conference Chair: W. EHRFELD, IMM, Germany

Conference Co-Chair: H. FUJITA, The University of Tokyo, Japan

Programme Committee

N. MARTENSSON, Lund University, Sweden
A. PICARD, Fachhochschule Rheinland-Pfalz, Zweibruecken, Germany
M. WECK, Fraunhofer-Institut fuer Produktionstechnologie, Aachen, Germany
D. TOLFREE, DRAL, Warrington, UK
H. DETTER, Fachhochschule Wiener Neustadt, Wien, Austria
J.P. GOURE, LTSI, Saint Etienne, France
D. HAUDEN, IMFC, Besancon, France
K. GABRIEL, Carnegie Mellon University, Pittsburgh, USA
P. RENAUD, EPFL, Lausanne, Switzerland
K. SATO, Nagoya University, Japan
R. MAEDA, Mechanical Engineering Laboratory, Tsukuba, Japan
J.B. SOHN, The Charles Stark Draper Laboratory, Cambridge, USA
P. COANE, Louisiana Tech., USA
E. PEETERS, Xerox Parc, Palo Alto, USA
K. CHAU, Analog Devices, Wilmington, USA
S. VALETTE, LETI, Grenoble, France
D. DASCALU, IMT, Bucharest, Romania

List of Posters


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